Bosch etch process consists of alternating etch and deposition cycles.... | Download Scientific Diagram
Development and Characterization of Tapered Silicon Etch Process by Topography Modeling for TSV Application
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PDF] An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon | Semantic Scholar
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Illustration of the trenching in the Bosch etching process [45,47].... | Download Scientific Diagram
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3D Nanopatterning and Nanofabrication: Using Nano-Scalloping Effects in Bosch Deep Reactive Ion Etching
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Comparison of deep silicon etching using SF6/C4F8 and SF6/C4F6 plasmas in the Bosch process: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena: Vol 26, No
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Passivation and etching steps in the Bosch process for deep reactive... | Download Scientific Diagram
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DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process - ScienceDirect
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PDF] DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process | Semantic Scholar
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PDF] An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon | Semantic Scholar
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